Structure and optical characterization of photochemically prepared ZrO2 thin films doped with erbium and europium

Abstract

Zirconium oxide thin films loaded with 10, 30 and 50 mol% lanthanide ions (Er or Eu) have been successfully prepared by direct UV (254 nm) irradiation of amorphous films of beta-diketonate complexes on Si(100) substrates, followed by a post annealing treatment process. The resultant films were characterized by X-ray photoelectron spectroscopy and Atomic Force Microscopy. The results showed that the stoichiometry of the resulting films were in relative agreement with the composition of the precursor films. The effects of annealing as well as the lanthanide ion loading on the photoluminescence (PL) emission intensity were investigated, finding that thermal treatment decreases surface roughness as well as PL emission intensity.