Low-energy ion beam synthesis of ag endotaxial nanostructures in silicon
Author
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Nagarajappa, Kiran
Author
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Guha, Puspendu
Author
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Thirumurugan, Arun
Author
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Satyam, Parlapalli V.
Author
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Bhatta, Umananda M.
Admission date
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2018-10-08T14:40:48Z
Available date
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2018-10-08T14:40:48Z
Publication date
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2018-06
Cita de ítem
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Applied Physics A (2018) 124:402
es_ES
Identifier
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10.1007/s00339-018-1815-y
Identifier
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https://repositorio.uchile.cl/handle/2250/151997
Abstract
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Coherently, embedded metal nanostructures (endotaxial) are known to have potential applications concerning the areas of plasmonics, optoelectronics and thermoelectronics. Incorporating appropriate concentrations of metal atoms into crystalline silicon is critical for these applications. Therefore, choosing proper dose of low-energy ions, instead of depositing thin film as a source of metal atoms, helps in avoiding surplus concentration of metal atoms that diffuses into the silicon crystal. In this work, 30 keV silver negative ions are implanted into a SiO (x) /Si(100) at two different fluences: 1 x 10(15) and 2.5 x 10(15) Ag- ions/cm(2). Later, the samples are annealed at 700 A degrees C for 1 h in Ar atmosphere. Embedded silver nanostructures have been characterized using planar and cross-sectional TEM (XTEM) analysis. Planar TEM analysis shows the formation of mostly rectangular silver nanostructures following the fourfold symmetry of the substrate. XTEM analysis confirms the formation of prism-shaped silver nanostructures embedded inside crystalline silicon. Endotaxial nature of the embedded crystals has been discussed using selected area electron diffraction analysis.
es_ES
Patrocinador
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UGC-DAE CSR, KC Collaborative Research Project
UGC-DAE-CSR-KC/CRS/15/IOP/MS/01/0669/0670/0755