(100) oriented diamond film prepared on amorphous carbon buffer layer containing nano-crystalline diamond grains
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In this study, amorphous carbon buffer layer containing nano-crystalline diamond grains was pre-deposited on single crystal silicon (Si) wafers. (100) oriented diamond films were prepared on the buffer layer by increasing deposition temperature. Morphology observation demonstrated that (100) oriented diamond plates appear on the buffer layer, thus realizing the deposition of (100) oriented diamond film. Transmission electron microscopy confirmed that (100) oriented diamond dominates deposition at high temperatures, leading to the formation of the (100) oriented diamond plates. The fast lateral growth of nano-crystalline diamond grains with (100) orientation in the buffer layer is the main driving force for the deposition of (100) oriented diamond film, providing a new route for the preparation of (100) oriented diamond films.
National Key Research and Development Project 2017YFE0128600 Ningbo 3315 Innovation Team Y90331DL02 Science and Technology Innovation 2025 Major Project of Ningbo 2018023 National Defense Key Laboratory Fund 6142807180511 'Key Talents' Senior Engineer Project of Ningbo Institute of Materials Technology and Engineering Comisión Nacional de Investigación Científica y Tecnológica (CONICYT) FONDECYT 11180121 '13th Five-Year' Equipment Pre-research Sharing Project E1710161
Artículo de publicación ISI
Quote ItemSurface & Coatings Technology 385 (2020) 125368
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